Piezoelectric MEMS driven by fluid flow

12.11.2013 by admin
We studied the response of multiple piezoelectric MEMS devices placed inside of a microchannel. The fluid flow actuates the piezo-devices and generates a voltage within the piezomaterial

The analysis was time-dependent, in order to observe the elastic piezo-devices for the full amplitude of deflection.

The behaviour of the multiple microstructures within the channel

The voltage generated within the piezomaterial

The stress within the piezoelectric device,
generated by the fluid flow

Applications range: energy harvesting, sensors.

The simulations were performed using the COMSOL Multiphysics suite.